JUSUNG ENGINEERING(www.jseng.com) will take a booth at SEMICON Korea on February 12th to 14th at COEX, Seoul to introduce its semiconductor product including 'Space Divided Plasma System'(SDP).
(image : MRAM ETCHER SYSTEM)
SDP-System(Space Divided Plasma System) features largely three functions which are 'ALD', 'CVD' and 'Treatment' for Nitridation, Oxidation and Doping. The system is capable to go through the process of ordinary PECVD, LPCVD and Defusion Furnishing, which can solve wafer damage problem by plasma.
Along with it, JUSUNG ENGINEERING will introduce M-RAM and SEG(selective epitaxial growth).
27th SEMICON Korea will be held from February 12 - 14 in Seoul, featuring over 500 exhibiting companies from 20 countries and more than 45,000 attendees. SEMICON Korea 2014 is the leading semiconductor technology event to explore the latest market trends and future developments for technology, featuring extensive technical forums, business programs and standards programs. LED Korea 2014 will be held simultaneously that is the only LED tech exhibition in Korea.
→ linked to the special page 'SEMICON KOREA 2014'
(image : UHV CVD SYSTEM (SEG : Selective Epitaxial Growth)
(image : DRY ETCHER SYSTEM)
(image : SDP (Space Divided Plasma) SYSTEM)